Scanning Electron Microscopy Laboratories
| Leo Microscope |
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The Leo 440 Scanning Electron Microscope has a tungsten filament electron source. Feature sizes of 50nm can be resolved with this machine. There is elemental analysis attached with this machine. There is e-beam lithography setup for pattern generation of 400 by 400 microns with 80nm line widths. Reservations For more information contact Matt DeLong, 581-7462 or Randy Polson, 581-7001. |
| FEI Microscope |
| The FEI NanoNova Scanning Electron Microscope is a field emitter electron source. Feature sizes of 2nm can be resolved. There is a low vacuum feature which allows imaging of non-conducting samples (biological samples need no special preparation). An x-ray elemental analysis system is attached to allow identification of elements within a sample as well as elemental mapping. E-beam lithography can write an area of 170 x 170 microns with 40nm linewidths. Reservations For more information contact Matt DeLong, 581-7462 or Randy Polson, 581-7001. |